Amtech Systems | SC 13G/A: Statement of acquisition of beneficial ownership by individuals (Amendment)-Wax Asset Management, LLC(11.3%)
Amtech Systems | 4: Statement of changes in beneficial ownership of securities-Officer DAIGLE ROBERT C
Amtech Systems | 4: Statement of changes in beneficial ownership of securities-Director Averick Robert M
Amtech Systems | 4: Statement of changes in beneficial ownership of securities-Officer Jenke Wade Michael
Amtech Systems | 3: Initial statement of beneficial ownership of securities-Officer Jenke Wade Michael
Amtech Systems | 4: Statement of changes in beneficial ownership of securities-Director Averick Robert M
Amtech Systems | SC 13D/A: Statement of acquisition of beneficial ownership by individuals (Amendment)-Robert Averick(19.2%), etc.
Amtech Systems | 4: Statement of changes in beneficial ownership of securities-Officer GIBBS LISA
Amtech Systems | 4: Statement of changes in beneficial ownership of securities-Director LUDWIG MICHAEL M
Amtech Systems | 4: Statement of changes in beneficial ownership of securities-Director GARNREITER MICHAEL
Amtech Systems | 4: Statement of changes in beneficial ownership of securities-Director LUDWIG MICHAEL M
Amtech Systems | 4: Statement of changes in beneficial ownership of securities-Director Averick Robert M
Amtech Systems | 4: Statement of changes in beneficial ownership of securities-Officer DAIGLE ROBERT C
Amtech Systems | 4: Statement of changes in beneficial ownership of securities-Director GARNREITER MICHAEL
Amtech Systems | 4: Statement of changes in beneficial ownership of securities-Director LUDWIG MICHAEL M
Amtech Systems | 4: Statement of changes in beneficial ownership of securities-Director Averick Robert M
Amtech Systems | 4: Statement of changes in beneficial ownership of securities-Officer DAIGLE ROBERT C
Amtech Systems | 4: Statement of changes in beneficial ownership of securities-Director Averick Robert M
Amtech Systems | SC 13G/A: Statement of acquisition of beneficial ownership by individuals (Amendment)
Amtech Systems | SC 13G/A: Statement of acquisition of beneficial ownership by individuals (Amendment)-Dimensional Fund Advisors LP(7.9%)
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